http://ir-heat-fire.com/zh/tags/%E5%BE%AE%E6%9C%BA%E7%94%B5%E7%B3%BB%E7%BB%9F/ Recent content in 微机电系统 on Intense Infrared Heating Lamps Hugo zh Mon, 27 Jul 2026 08:26:45 +0800 http://ir-heat-fire.com/zh/posts/reducing-equipment-wall-heat-in-mems-wafer-drying-via-directional-ir-heating/ Mon, 27 Jul 2026 08:26:45 +0800 http://ir-heat-fire.com/zh/posts/reducing-equipment-wall-heat-in-mems-wafer-drying-via-directional-ir-heating/ <p><img src="http://ir-heat-fire.com/images/e359da41a435291bc4b653b358552252.png" alt="MEMS传感器晶圆干燥加热器"></p> <p>一种更有效的MEMS晶圆干燥方法<br> 如果您从事过MEMS传感器的制造工作，就会知道其中存在的挑战。要让晶圆在干燥过程中不会留下残留物，或者因热应力而变形，实在是一件非常困难的事。</p>