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		<title>烘烤；焙 on Intense Infrared Heating Lamps</title>
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				<title>受控气氛烘烤灯</title>
				<link>http://ir-heat-fire.com/zh/posts/controlled-atmosphere-bake-lamp/</link>
				<pubDate>Wed, 03 Jun 2026 12:07:30 +0800</pubDate>
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				<description>&lt;p&gt;&lt;img src=&#34;http://ir-heat-fire.com/images/c4487c91a5d0bd93963bf8b3a19ba704.png&#34; alt=&#34;受控气氛烘烤灯&#34;&gt;&lt;/p&gt;&#xA;&lt;p&gt;在晶圆厂车间，光刻胶烘烤绝不是“单纯的温度步骤”。这是你必须严格控制的热预算。&lt;br&gt;&#xA;软烘烤或硬烘烤中温度漂移0.5°C，就会导致关键尺寸（CD）分布发生变化。一次颗粒事件就可能报废整批晶圆。当生产线安排为7×24小时连续运行时，烘烤设备必须在每个班次中提供相同的热剖面，不能有任何借口。&lt;/p&gt;</description>
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